Electrical properties of polysilicon nanowires for device applications
نویسندگان
چکیده
منابع مشابه
Polysilicon Nanowires for chemical sensing applications
Polycrystalline silicon nanowires are synthesized using a classical fabrication method commonly used in microelectronic industry: the sidewall spacer formation technique. Assets of this technological process rest on low cost lithographic tools use, classical silicon planar technology compatibility and the possibility to get by direct patterning numerous parallel nanowires with precise location ...
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ژورنال
عنوان ژورنال: physica status solidi (c)
سال: 2010
ISSN: 1862-6351
DOI: 10.1002/pssc.201000227